In this work the optical and electrical characteristics of radio frequency sputtered indium tin oxide (ITO), aluminum doped zinc oxide (AZO) and nickel oxide (NiOx) are reported. ITO and AZO films showed very high visible transmittance values, with maxima up to 90-91%, and sheet resistance of 35 and 33 ω/-, respectively, while non stoichiometric NiO films showed visible transmittance up to 53% and sheet resistance of several tens of Kω/-. Properties of the films were correlated to their structure and morphology which are strongly dependent on the growth parameters.
Optical and electrical characteristics of radio frequency sputtered ITO and In-free transparent conductors
Grilli M. L.
2019-01-01
Abstract
In this work the optical and electrical characteristics of radio frequency sputtered indium tin oxide (ITO), aluminum doped zinc oxide (AZO) and nickel oxide (NiOx) are reported. ITO and AZO films showed very high visible transmittance values, with maxima up to 90-91%, and sheet resistance of 35 and 33 ω/-, respectively, while non stoichiometric NiO films showed visible transmittance up to 53% and sheet resistance of several tens of Kω/-. Properties of the films were correlated to their structure and morphology which are strongly dependent on the growth parameters.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
