The optical properties of room temperature sputter-deposited metal oxide films on fused silica substrates are investigated by in situ spectroscopic ellipsometry over a wide temperature range. © OSA 2016.
Ellipsometric monitoring of the refractive index evolution versus temperature for various metal oxides commonly used in interference filters
Grilli, M.L.;Sytchkova, A.
2016-01-01
Abstract
The optical properties of room temperature sputter-deposited metal oxide films on fused silica substrates are investigated by in situ spectroscopic ellipsometry over a wide temperature range. © OSA 2016.File in questo prodotto:
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