The increasing use of thin film semiconductors in device applications has forced the change to new deposition and processing technologies, compared to the familiar wafer semiconductor technologies. In spite of the lower performance, the process flexibility allowed with low temperature processing has opened the way to quite new products, based on thin film semiconductors. © 2000 American Institute of Physics.
Applications of thin film semiconductors
Della Sala, D.
2000-01-01
Abstract
The increasing use of thin film semiconductors in device applications has forced the change to new deposition and processing technologies, compared to the familiar wafer semiconductor technologies. In spite of the lower performance, the process flexibility allowed with low temperature processing has opened the way to quite new products, based on thin film semiconductors. © 2000 American Institute of Physics.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.