Investigation of multiwalled carbon nanotube interconnection geometry and electrical characteristics of an CNT-filled aluminum microgap1

In recent years a very large amount of data has been collected regarding devices formed by multiwalled carbon nanotubes (MWCNTs) in polymer matrix as well as single nanotubes. Conversely, very little investigation exists of nanotube networks composed of a small number of MWCNTs. A detailed investigation of the long time stability, adhesion to the surface, and topological structure of the interconnections between MWCNTs is reported here. Three different microscopy techniques, focused ion beam (FIB), scanning electron microscope (SEM), and atomic force microscope (AFM), were used to investigate the interconnection of MWCNTs deposited by electrophoresis on a thermally oxidized silicon wafer with aluminum microgap structures. SEM, AFM, and FIB imaging revealed an interesting interconnection morphology between the drop casted MWCNTs. In particular it was found that in some cases the MWCNTs were connected to each other in a geometry similar to a twisted structure. Furthermore a good stability of the sample in time has been found, proving a strong adhesion of the nanotubes to the oxide surface. Despite the fact that electrical contacts with aluminum to carbon nanotube-based devices are in general not very reliable, using the dielectrophoresis deposition technique with an adequate subsequent annealing procedure, long-term stable temperature sensors with carbon nanotube networks in the aluminum contact microgap were realized. Their temperature dependence can be explained by modeling the internanotube contact resistance. © 2013 Published by NRC Research Press.