The optical properties of room temperature sputter-deposited metal oxide films on fused silica substrates are investigated by in situ spectroscopic ellipsometry over a wide temperature range. © OSA 2016.
Ellipsometric monitoring of the refractive index evolution versus temperature for various metal oxides commonly used in interference filters
Grilli, M.L.;Sytchkova, A.
2016-01-01
Abstract
The optical properties of room temperature sputter-deposited metal oxide films on fused silica substrates are investigated by in situ spectroscopic ellipsometry over a wide temperature range. © OSA 2016.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.