This work shows experimental results obtained in testing a thin film piezo actuated silicon membrane in a controlled environment. The main aim of this work was to select humidity concentration as one of the most influencing factors on vibrating characteristic of the circular clamped membrane. Thanks to fine control of humidity and the parallel feedback due to calibrated sensors we established a precise correlation between humidity and resonant shift.
Concept of MEMS Vibrating Membrane as Particulate Matter (PM) Sensor
Massera E.
2021-01-01
Abstract
This work shows experimental results obtained in testing a thin film piezo actuated silicon membrane in a controlled environment. The main aim of this work was to select humidity concentration as one of the most influencing factors on vibrating characteristic of the circular clamped membrane. Thanks to fine control of humidity and the parallel feedback due to calibrated sensors we established a precise correlation between humidity and resonant shift.File in questo prodotto:
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