Among the transparent conductor, one of themost interesting is the Al doped MgxZn1-xO films for their electrical properties that make it very attracting for solar cell application. In thiswork, the Mg distribution in Al doped MgxZn1-xO films was investigated in order to find a reliable methods to determine Mg distribution. In particular, X-ray diffraction, Auger electron spectroscopy and time of flight secondary ion mass spectrometry were used to characterize the film. Time of flight secondary ion mass spectrometry MCs+ results appear to be the most promising analytical technique.
Determination of Mg concentration and distribution in MgxZn1-xO films for photonic devices application
Tapfer, L.
2014-01-01
Abstract
Among the transparent conductor, one of themost interesting is the Al doped MgxZn1-xO films for their electrical properties that make it very attracting for solar cell application. In thiswork, the Mg distribution in Al doped MgxZn1-xO films was investigated in order to find a reliable methods to determine Mg distribution. In particular, X-ray diffraction, Auger electron spectroscopy and time of flight secondary ion mass spectrometry were used to characterize the film. Time of flight secondary ion mass spectrometry MCs+ results appear to be the most promising analytical technique.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.