We demonstrate the successful operation of a chemical microsensor based on Thin Film Bulk Acoustic Resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AIN/SI 3N4 fabricated on silicon substrate and resonating at the frequency of 1.045 GHz. Using a nanocomposite layer based on Single-Walled Carbon Nanotubes (SWCNTs) and prepared by the Langmuir-Blodgett technique onto the TFBAR device as highly-sensitive nanomaterial, the sensing performance of TFBAR sensor has been evaluated both as a passive device by a network analyzer with phase and insertion loss responses, and as oscillator with frequency response. The vapor sensing characteristics of SWCNTs-based TFBAR sensor are presented illustrating interesting results. © 2007 IEEE.
Thin film bulk acoustic resonator vapor sensors with single-walled carbon nanotubes-based nanocomposite layer
Penza M.;Cassano G.;Aversa P.;Suriano D.;
2007-01-01
Abstract
We demonstrate the successful operation of a chemical microsensor based on Thin Film Bulk Acoustic Resonator (TFBAR) for organic vapor detection at room temperature. The TFBAR consists of a vibrating membrane of AIN/SI 3N4 fabricated on silicon substrate and resonating at the frequency of 1.045 GHz. Using a nanocomposite layer based on Single-Walled Carbon Nanotubes (SWCNTs) and prepared by the Langmuir-Blodgett technique onto the TFBAR device as highly-sensitive nanomaterial, the sensing performance of TFBAR sensor has been evaluated both as a passive device by a network analyzer with phase and insertion loss responses, and as oscillator with frequency response. The vapor sensing characteristics of SWCNTs-based TFBAR sensor are presented illustrating interesting results. © 2007 IEEE.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
