A chemical sensor based on Thin-Film Bulk Acoustic Resonator (TFBAR) structure is designed, fabricated and functionally characterized. A novel acoustic gas microsensor is represented by TFBAR consisting of a piezoelectric A1N thin layer sandwiched between two metallic Al electrodes and excited by a microwave signal to build a vibrating membrane integrated onto silicon substrate and resonating at 1.045 GHz frequency. Nanocomposite film based on Single-Walled Carbon Nanotubes (SWCNTs) with nanostructured properties have been prepared by Langmuir-Blodgett (LB) material processing technique to functionalise the surface of TFBAR devices for gas detection. Based on the excellent integration compatibility with SWCNTs-based TFBAR sensor, the studied sensing device provides the potentiality in high-performance gas detection applications. The sensing characteristics towards vapors of acetone, ethylacetate, toluene, alcohols have been measured at room temperature with high sensitivity, fast response, good reversibility and repeatability of response.
VAPOR SENSOR USING THIN FILM BULK ACOUSTIC RESONATOR COATED BY CARBON NANOTUBES-BASED NANOCOMPOSITE LAYER
PENZA, M.;AVERSA, P.;CASSANO, G.;SERRA, E.;SURIANO, D.;
2008-01-01
Abstract
A chemical sensor based on Thin-Film Bulk Acoustic Resonator (TFBAR) structure is designed, fabricated and functionally characterized. A novel acoustic gas microsensor is represented by TFBAR consisting of a piezoelectric A1N thin layer sandwiched between two metallic Al electrodes and excited by a microwave signal to build a vibrating membrane integrated onto silicon substrate and resonating at 1.045 GHz frequency. Nanocomposite film based on Single-Walled Carbon Nanotubes (SWCNTs) with nanostructured properties have been prepared by Langmuir-Blodgett (LB) material processing technique to functionalise the surface of TFBAR devices for gas detection. Based on the excellent integration compatibility with SWCNTs-based TFBAR sensor, the studied sensing device provides the potentiality in high-performance gas detection applications. The sensing characteristics towards vapors of acetone, ethylacetate, toluene, alcohols have been measured at room temperature with high sensitivity, fast response, good reversibility and repeatability of response.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
