A thin-film bulk acoustic resonator (TFBAR) based on a vibrating membrane of AlN/Si3N4 has been fabricated onto a silicon substrate and functionally characterized as gas sensor at a resonating frequency of 1.045 GHz. This novel TFBAR-based gas sensor has been functionalized by a sensing nanocomposite layer, prepared by a Langmuir-Blodgett (LB) technique, of single-walled carbon nanotubes (SWCNTs) embedded in a host matrix of organic material of cadmium arachidate. High-performance gas detection at room temperature of a SWCNT-coated TFBAR sensor has been reported. The sensing device exhibits high sensitivity (e.g., acetone: 12 kHz/ppm; ethylacetate: 17.3 kHz/ ppm), fast response (within 2-3 min), slow reversibility (within 1 h), and good repeatability (≤5% variation) of response toward tested organic vapors of acetone, ethylacetate, and toluene. © 2008 IEEE.
Thin-film bulk-acoustic-resonator gas sensor functionalized with a nanocomposite Langmuir-Blodgett layer of carbon nanotubes
Penza M.;Aversa P.;Cassano G.;Suriano D.;
2008-01-01
Abstract
A thin-film bulk acoustic resonator (TFBAR) based on a vibrating membrane of AlN/Si3N4 has been fabricated onto a silicon substrate and functionally characterized as gas sensor at a resonating frequency of 1.045 GHz. This novel TFBAR-based gas sensor has been functionalized by a sensing nanocomposite layer, prepared by a Langmuir-Blodgett (LB) technique, of single-walled carbon nanotubes (SWCNTs) embedded in a host matrix of organic material of cadmium arachidate. High-performance gas detection at room temperature of a SWCNT-coated TFBAR sensor has been reported. The sensing device exhibits high sensitivity (e.g., acetone: 12 kHz/ppm; ethylacetate: 17.3 kHz/ ppm), fast response (within 2-3 min), slow reversibility (within 1 h), and good repeatability (≤5% variation) of response toward tested organic vapors of acetone, ethylacetate, and toluene. © 2008 IEEE.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
